Pressure control in a laser charging chamber Proportional an electrical proportional valve

When controlling the gas entering the plenum, mass flow control is (typically) employed. However, in this sketch, we demonstrate laser charging chamber pressure control to achieve similar results. A 3-station SPV (manifold mount) pressure control assembly controls 3 different gases to a fixed (and known) orifice. By changing the pressure of the fixed orifice, the flow rate can be changed and produce predictable and repeatable results.

Although not as effective and accurate as using mass flow controllers for each gas, this concept is more affordable and can produce excellent results. The simple concept behind it: if you know the exact size of the orifice, the gas density and the pressure, you can predict the flow through the orifice.

Electrical, control, flow, gas, pressure, orifice, result, can, one, change