2024-03-11
One of the applications of Proportionair proportional valve in semiconductor industry-CMP polishing force control
known as chemical mechanical planarization(CMP)The process is commonly used in the semiconductor industry to polish silicon wafers into products that can be used in hard disk drives and other computer components.CMPPolishing force control isCMPAn important part of the process. If the force applied throughout the polishing process is inconsistent and non-repeatable, the wafer may be permanently damaged——The process of producing these wafers is very expensive.
The semiconductor wafer is ground and polished to a mirror finish. Low-friction or no-friction cylinders are often used to achieve optimal force control.QPV2An electronically controlled valve is used to control the force on the polishing drum. Full-scale calibration±0.005%The resolution allows for small changes in force. Full scale±0.02%The repeatability ensures that the same force is always generated using the same command signal. The analog monitoring signal output from the downstream pressure isQPV2Available on the main electrical connector, which can be used for continuous data acquisition.
Polishing, for, control, use, full scale, same, friction, Proportion-air
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