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2024-03-11

One of the applications of Proportionair proportional valve in semiconductor industry-wafer polishing

Producing a nearly perfectly flat surface from a silicon wafer is a necessary condition for integrated circuit fabrication. When you work in the nanometer range, you need to make sure that your pneumatics are as accurate as your process. By controlling the pressure applied to the polishing pad to a range as small0.005%The incremental, proportional air valve provides this trust while also being one of the highest resolutions in the industry.

In the semiconductor industry, wafers are thin sheets of silicon ingots used for many different applications. Semiconductor wafer polishing is one of the most important steps in preparing a wafer for use.

Many different types of polishing tools can be used, but precise force control is required to make a consistent product. In this application, installSBM-7on the base manifold7OneMM1The control applies pressure to a spring-loaded cylinder for polishing the wafer. The base has a common air supply port and a common exhaust port, but if necessary, eachMMUnits can work independently.