2024-03-11

Proportionair proportional valve in the semiconductor industry one of the applications CMP machine pad polishing


In the semiconductor industry, a technique called chemical mechanical planarization(CMP)The process is used to polish wafers. These wafers are used in hard disk drives and other components to store and retrieve information.CMPMachine pad polishing is a critical step in producing high quality wafers. This process is designed to remove excess material and create a smooth surface.

Many different types of pads can be used to create the desired surface on the wafer. However, all of these pads must be applied to the wafer with repeatable and accurate force control. Proportional air is commonly usedControlCMPForce in machine pad polishing applications.

The semiconductor wafer will be polished to a mirror high finish. If the pads are not perfectly flat, the polished wafer will not meet specifications.Proportion-AirofQB2Proportional valves are ideal for such applications that use load cells as feedback. This allows closed-loop high-precision control around the customer's load cell.QB2Also able to collect analog output and send it backPLCor controller for data acquisition. This information can be used to ensure proper operation or to diagnose problems.

Polishing, wafer, cmp, control, QB2